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Engineering    2017, Vol. 3 Issue (5) : 708-715
Research |
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This paper presents the design, development, and control of a large range beam flexure-based nano servo system for the micro-stereolithography (MSL) process. As a key enabler of high accuracy in this process, a compact desktop-size beam flexure-based nanopositioner was designed with millimeter range and nanometric motion quality. This beam flexure-based motion system is highly suitable for harsh operation conditions, as no assembly or maintenance is required during the operation. From a mechanism design viewpoint, a mirror-symmetric arrangement and appropriate redundant constraints are crucial to reduce undesired parasitic motion. Detailed finite element analysis (FEA) was conducted and showed satisfactory mechanical features. With the identified dynamic models of the nanopositioner, real-time control strategies were designed and implemented into the monolithically fabricated prototype system, demonstrating the enhanced tracking capability of the MSL process. The servo system has both a millimeter operating range and a root mean square (RMS) tracking error of about 80?nm for a circular trajectory.

Keywords Precision additive manufacturing      Micro-stereolithography      Nanopositioning      Beam flexure     
在线预览日期:    发布日期: 2017-11-08
Zhen Zhang
Peng Yan
Guangbo Hao
Zhen Zhang,Peng Yan,Guangbo Hao. A Large Range Flexure-Based Servo System Supporting Precision Additive Manufacturing[J]. Engineering, 2017, 3(5): 708-715.
网址:     OR
Fig.1  Schematic design of a beam flexure-based MSL system.
Fig.2  A large range beam flexure-based XY nanopositioner.
Fig.3  Overall stiffness model of the XY nanopositioning stage.
Fig.4  The geometry of the Z-shaped and Π-shaped beam flexures and their equivalent stiffness model.
Parameter Geometric size (mm)
The length of Π-shaped beam flexure, lΠ 40.0
The height of Π-shaped beam flexure, dΠ 10.0
The width of Π-shaped beam flexure, tΠ 0.4
The length of four-beam flexure, l4beam 80.0
The width of four-beam flexure, t4beam 1.3
The width of Z-shaped beam flexure, tZ 0.4
Tab.1  The optimized parameters of the proposed nanopositioner.
Fig.5  FEA result of the normalized stiffness of the Z-shaped beam flexure.
Fig.6  FEA results of modal analysis. (a) FEA result of the first six order modals: (i) 1st modal (76.1?Hz); (ii) 2nd modal (76.3?Hz); (iii) 3rd modal (126.3?Hz); (iv) 4th modal (243.1?Hz); (v) 5th modal (243.6?Hz); (vi) 6th modal (245.2?Hz). (b) FEA result of the X and Y axes: (i) modal of X axis (55.0?Hz); (ii) modal of Y axis (55.4?Hz).
Error motion Natural frequency
Without four-beam redundant constraint 193.8?nm 44.1?Hz
With four-beam redundant constraint 87.1?nm 55.0?Hz
Improvement 55.1% 24.7%
Tab.2  FEA comparison between the proposed design and the same design without a four-beam redundant constraint.
Fig.7  Prototype of the large range XY beam flexure-based nanopositioner.
Fig.8  Real-time control system. (a) Control box; (b) real-time control board.
Fig.9  Host computer interface.
Fig.10  The experimental result of the parasitic motion.
Fig.11  Modal analysis of the beam flexure-based stage: Resonant frequency without actuators.
Fig.12  Experimental result of bi-axis contour tracking. (a) Circular tracking result; (b) tracking error in the polar coordinates.
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