Please wait a minute...
Submit  |   Chinese  | 
 
Advanced Search
   Home  |  Online Now  |  Current Issue  |  Focus  |  Archive  |  For Authors  |  Journal Information   Open Access  
Submit  |   Chinese  | 
Engineering    2017, Vol. 3 Issue (5) : 708 -715     https://doi.org/10.1016/J.ENG.2017.05.020
Research |
A Large Range Flexure-Based Servo System Supporting Precision Additive Manufacturing
Zhen Zhang1,2,3,Peng Yan4(),Guangbo Hao5()
1. State Key Laboratory of Tribology & Institute of Manufacturing Engineering, Tsinghua University, Beijing 100084, China
2. Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, Tsinghua University, Beijing 100084, China
3. Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
4. Key Laboratory of High-Efficiency and Clean Mechanical Manufacturing, Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan 250061, China
5. Department of Electrical and Electronic Engineering, University College Cork, Cork, Ireland
Abstract
Abstract  

This paper presents the design, development, and control of a large range beam flexure-based nano servo system for the micro-stereolithography (MSL) process. As a key enabler of high accuracy in this process, a compact desktop-size beam flexure-based nanopositioner was designed with millimeter range and nanometric motion quality. This beam flexure-based motion system is highly suitable for harsh operation conditions, as no assembly or maintenance is required during the operation. From a mechanism design viewpoint, a mirror-symmetric arrangement and appropriate redundant constraints are crucial to reduce undesired parasitic motion. Detailed finite element analysis (FEA) was conducted and showed satisfactory mechanical features. With the identified dynamic models of the nanopositioner, real-time control strategies were designed and implemented into the monolithically fabricated prototype system, demonstrating the enhanced tracking capability of the MSL process. The servo system has both a millimeter operating range and a root mean square (RMS) tracking error of about 80?nm for a circular trajectory.

Keywords Precision additive manufacturing      Micro-stereolithography      Nanopositioning      Beam flexure     
Fund: 
Corresponding Authors: Peng Yan,Guangbo Hao   
Online First Date: 06 November 2017    Issue Date: 08 November 2017
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
Zhen Zhang
Peng Yan
Guangbo Hao
Cite this article:   
Zhen Zhang,Peng Yan,Guangbo Hao. A Large Range Flexure-Based Servo System Supporting Precision Additive Manufacturing[J]. Engineering, 2017, 3(5): 708 -715 .
URL:  
http://engineering.org.cn/EN/10.1016/J.ENG.2017.05.020     OR     http://engineering.org.cn/EN/Y2017/V3/I5/708
References
1   Ikuta K, Hirowatari K. Real three dimensional micro fabrication using stereo lithography and metal molding. In: Proceedings of the IEEE International Workshop on Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems; 1993 Feb 7–10; Fort Lauderdale, FL, USA. Piscataway: The Institute of Electrical and Electronics Engineers, Inc.; 1993. p. 42–7
doi: 10.1109/MEMSYS.1993.296949
2   Ikuta K, Maruo S, Kojoma S. New micro stereo lithography for freely movable 3D micro structure-super IH process with submicron resolution. In: Proceedings of the Eleventh Annual International Workshop on Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems; 1998 Jan 25–29; Heidelberg, Germany. Piscataway: The Institute of Electrical and Electronics Engineers, Inc., 1998. p. 290–5
doi: 10.1109/MEMSYS.1998.659770
3   Choi JS, Kang HW, Lee IH, Ko TJ, Cho DW. Development of micro-stereolithography technology using a UV lamp and optical fiber. Int J Adv Manuf Tech 2009;41(3–4):281–6
doi: 10.1007/s00170-008-1461-1
4   Shoji S, Smith N, Kawata S. Photofabrication of a photonic crystal using interference of a UV laser. Proc SPIE 1999;3740:541–4
doi: 10.1117/12.347738
5   Neumann J, Wieking KS, Kip D. Direct laser writing of surface reliefs in dry, self-developing photopolymer films. Appl Opt 1999;38(25):5418–21
doi: 10.1364/AO.38.005418
6   Straub M, Ventura M, Gu M. Multiple higher-order stop gaps in infrared polymer photonic crystals. Phys Rev Lett 2003;91(4):043901
doi: 10.1103/PhysRevLett.91.043901
7   Bertsch A, Zissi S, Jézéquel JY, Corbel S, André JC. Microstereophotolithography using a liquid crystal display as dynamic mask-generator. Microsyst Technol 1997;3(2):42–7
doi: 10.1007/s005420050053
8   Vaezi M, Seitz H, Yang S. A review on 3D micro-additive manufacturing technologies. Int J Adv Manuf Tech 2013;67(5–8):1721–54
doi: 10.1007/s00170-012-4605-2
9   Xu G, Zhao W, Tang Y, Lu B. Novel stereolithography system for small size objects. Rapid Prototyping J 2006;12(1):12–7
doi: 10.1108/13552540610637228
10   Roy NK, Cullinan MA. µ-SLS of metals: Design of the powder spreader, powder bed actuators and optics for the system. In: Proceedings of the 26th Annual International Solid Freeform Fabrication Symposium—An Additive Manufacturing Conference; 2015 Aug 10–12; Austin, TX, USA. Austin: University of Texas at Austin; 2015. p. 134–55.
11   Awtar S, Parmar G. Design of a large range XY nanopositioning system. J Mech Robot 2013;5(2):021008
doi: 10.1115/1.4023874
12   Xu Q. Design and development of a compact flexure-based XY precision positioning system with centimeter range. IEEE Trans Ind Electron 2014;61(2):893–903
doi: 10.1109/TIE.2013.2257139
13   Zhou X, Wang D, Wang J, Chen SC. Precision design and control of a flexure-based roll-to-roll printing system. Precis Eng 2016;45:332–41
doi: 10.1016/j.precisioneng.2016.03.010
14   Kang HW, Jeong YS, Lee SJ, Kim KS, Yun WS. Development of a compact micro-stereolithography (MSTL) system using a Blu-ray optical pickup unit. J Micromech Microeng 2012;22(11):115021
doi: 10.1088/0960-1317/22/11/115021
15   Hao G, Yu J. Design, modelling and analysis of a completely-decoupled XY compliant parallel manipulator. Mech Mach Theory 2016;102:179–95
doi: 10.1016/j.mechmachtheory.2016.04.006
16   Zhang Z, Liu Z, Yan P. Design of a flexure-based XY positioning stage with balanced axial forces on decoupling modules. In: Proceedings of the 6th International Conference on Manipulation, Manufacturing, Measurement on the Nanoscale; 2016 Jul 18–22; Chongqing, China. Piscataway: The Institute of Electrical and Electronics Engineers, Inc.; 2016. p. 83–8
doi: 10.1109/3M-NANO.2016.7824921
17   Yu J, Xie Y, Li Z, Hao G. Design and experimental testing of an improved large-range decoupled XY compliant parallel micromanipulator. J Mech Robot 2015;7(4):044503
doi: 10.1115/1.4030467
18   Zhang Z, Wang P, Yan P, Guan Y. A beam flexure-based nanopositioning stage supporting laser direct-write nanofabrication. Sci China Phys Mech Astron 2016;59(8):684211
doi: 10.1007/s11433-016-0132-x
19   Awtar S, Slocum AH, Sevincer E. Characteristics of beam-based flexure modules. J Mech Design 2007;129(6):625–39
doi: 10.1115/1.2717231
Related
[1] Zhuo Cheng, Lang Qin, Jonathan A. Fan, Liang-Shih Fan. New Insight into the Development of Oxygen Carrier Materials for Chemical Looping Systems[J]. Engineering, 2018, 4(3): 343 -351 .
[2] Jennifer A. Clark, Erik E. Santiso. Carbon Sequestration through CO2 Foam-Enhanced Oil Recovery: A Green Chemistry Perspective[J]. Engineering, 2018, 4(3): 336 -342 .
[3] Andrea Di Maria, Karel Van Acker. Turning Industrial Residues into Resources: An Environmental Impact Assessment of Goethite Valorization[J]. Engineering, 2018, 4(3): 421 -429 .
[4] Lance A. Davis. Falcon Heavy[J]. Engineering, 2018, 4(3): 300 .
[5] Augusta Maria Paci. A Research and Innovation Policy for Sustainable S&T: A Comment on the Essay ‘‘Exploring the Logic and Landscape of the Knowledge System”[J]. Engineering, 2018, 4(3): 306 -308 .
[6] Ning Duan. When Will Speed of Progress in Green Science and Technology Exceed that of Resource Exploitation and Pollutant Generation?[J]. Engineering, 2018, 4(3): 299 .
[7] Jian-guo Li, Kai Zhan. Intelligent Mining Technology for an Underground Metal Mine Based on Unmanned Equipment[J]. Engineering, 2018, 4(3): 381 -391 .
[8] Veena Sahajwalla. Green Processes: Transforming Waste into Valuable Resources[J]. Engineering, 2018, 4(3): 309 -310 .
[9] Junye Wang, Hualin Wang, Yi Fan. Techno-Economic Challenges of Fuel Cell Commercialization[J]. Engineering, 2018, 4(3): 352 -360 .
[10] Raymond RedCorn, Samira Fatemi, Abigail S. Engelberth. Comparing End-Use Potential for Industrial Food-Waste Sources[J]. Engineering, 2018, 4(3): 371 -380 .
[11] Ning Duan, Linhua Jiang, Fuyuan Xu, Ge Zhang. A Non-Contact Original-State Online Real-Time Monitoring Method for Complex Liquids in Industrial Processes[J]. Engineering, 2018, 4(3): 392 -397 .
[12] Keith E. Gubbins, Kai Gu, Liangliang Huang, Yun Long, J. Matthew Mansell, Erik E. Santiso, Kaihang Shi, Małgorzata Ś liwińska-Bartkowiak, Deepti Srivastava. Surface-Driven High-Pressure Processing[J]. Engineering, 2018, 4(3): 311 -320 .
[13] Steff Van Loy, Koen Binnemans, Tom Van Gerven. Mechanochemical-Assisted Leaching of Lamp Phosphors: A Green Engineering Approach for Rare-Earth Recovery[J]. Engineering, 2018, 4(3): 398 -405 .
[14] Robert S. Weber, Johnathan E. Holladay. Modularized Production of Value-Added Products and Fuels from Distributed Waste Carbon-Rich Feedstocks[J]. Engineering, 2018, 4(3): 330 -335 .
[15] Hualin Wang, Pengbo Fu, Jianping Li, Yuan Huang, Ying Zhao, Lai Jiang, Xiangchen Fang, Tao Yang, Zhaohui Huang, Cheng Huang. Separation-and-Recovery Technology for Organic Waste Liquid with a High Concentration of Inorganic Particles[J]. Engineering, 2018, 4(3): 406 -415 .
Copyright © 2015 Higher Education Press & Engineering Sciences Press, All Rights Reserved.
京ICP备11030251号-2

 Engineering