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Engineering    2017, Vol. 3 Issue (5) : 708 -715
Research |
A Large Range Flexure-Based Servo System Supporting Precision Additive Manufacturing
Zhen Zhang1,2,3,Peng Yan4(),Guangbo Hao5()
1. State Key Laboratory of Tribology & Institute of Manufacturing Engineering, Tsinghua University, Beijing 100084, China
2. Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, Tsinghua University, Beijing 100084, China
3. Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
4. Key Laboratory of High-Efficiency and Clean Mechanical Manufacturing, Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan 250061, China
5. Department of Electrical and Electronic Engineering, University College Cork, Cork, Ireland

This paper presents the design, development, and control of a large range beam flexure-based nano servo system for the micro-stereolithography (MSL) process. As a key enabler of high accuracy in this process, a compact desktop-size beam flexure-based nanopositioner was designed with millimeter range and nanometric motion quality. This beam flexure-based motion system is highly suitable for harsh operation conditions, as no assembly or maintenance is required during the operation. From a mechanism design viewpoint, a mirror-symmetric arrangement and appropriate redundant constraints are crucial to reduce undesired parasitic motion. Detailed finite element analysis (FEA) was conducted and showed satisfactory mechanical features. With the identified dynamic models of the nanopositioner, real-time control strategies were designed and implemented into the monolithically fabricated prototype system, demonstrating the enhanced tracking capability of the MSL process. The servo system has both a millimeter operating range and a root mean square (RMS) tracking error of about 80?nm for a circular trajectory.

Keywords Precision additive manufacturing      Micro-stereolithography      Nanopositioning      Beam flexure     
Corresponding Authors: Peng Yan,Guangbo Hao   
Online First Date: 06 November 2017    Issue Date: 08 November 2017
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Zhen Zhang,Peng Yan,Guangbo Hao. A Large Range Flexure-Based Servo System Supporting Precision Additive Manufacturing[J]. Engineering, 2017, 3(5): 708 -715 .
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